JPH0635365Y2 - 電子線照射装置 - Google Patents

電子線照射装置

Info

Publication number
JPH0635365Y2
JPH0635365Y2 JP1988094695U JP9469588U JPH0635365Y2 JP H0635365 Y2 JPH0635365 Y2 JP H0635365Y2 JP 1988094695 U JP1988094695 U JP 1988094695U JP 9469588 U JP9469588 U JP 9469588U JP H0635365 Y2 JPH0635365 Y2 JP H0635365Y2
Authority
JP
Japan
Prior art keywords
discharge
voltage
electron beam
acceleration
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988094695U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0216555U (en]
Inventor
寿男 木村
神治 麻生
隆裕 寺沢
Original Assignee
日新ハイボルテージ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテージ株式会社 filed Critical 日新ハイボルテージ株式会社
Priority to JP1988094695U priority Critical patent/JPH0635365Y2/ja
Publication of JPH0216555U publication Critical patent/JPH0216555U/ja
Application granted granted Critical
Publication of JPH0635365Y2 publication Critical patent/JPH0635365Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)
JP1988094695U 1988-07-18 1988-07-18 電子線照射装置 Expired - Lifetime JPH0635365Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988094695U JPH0635365Y2 (ja) 1988-07-18 1988-07-18 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988094695U JPH0635365Y2 (ja) 1988-07-18 1988-07-18 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH0216555U JPH0216555U (en]) 1990-02-02
JPH0635365Y2 true JPH0635365Y2 (ja) 1994-09-14

Family

ID=31319262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988094695U Expired - Lifetime JPH0635365Y2 (ja) 1988-07-18 1988-07-18 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0635365Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010218885A (ja) * 2009-03-17 2010-09-30 Nuflare Technology Inc 電子銃のコンディショニング処理方法
JP5450322B2 (ja) * 2010-08-31 2014-03-26 株式会社ニューフレアテクノロジー 電子銃のコンディショニング方法および電子ビーム描画装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5219181B2 (en]) * 1972-06-22 1977-05-26
JPS5991650A (ja) * 1982-11-17 1984-05-26 Hitachi Ltd 電子ビ−ム加工機
JPH0665018B2 (ja) * 1985-05-21 1994-08-22 株式会社日立製作所 荷電粒子加速電圧制御方法および装置

Also Published As

Publication number Publication date
JPH0216555U (en]) 1990-02-02

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